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Electrical and Optical Properties of In and Al Doped ZnO Thin Film
저자
Sang
학술지명
Electronic Materials Letters
출판/발행연도
2013
주제
요약
본 연구는 산화아연 박막의 전기적, 광학적 특성을 향상시키기 위해 알루미늄 도핑된 산화아연 박막에 소량의 인듐을 추가하는 방법을 제시합니다. 용액-젤 공정을 통해 유리 기판 위에 인듐과 알루미늄이 도핑된 산화아연 박막을 제작하고 급속 열처리를 적용하여 박막의 특성을 개선했습니다.
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