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Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge
저자
조영식
학술지명
Journal of Information and Communication Convergence Engineering
출판/발행연도
2017
주제
요약
본 연구는 MEMS 아날로그 Pirani 게이지를 이용하여 디지털 진공 압력 센서를 설계, 제작 및 특성화했습니다. 아날로그 Pirani 게이지의 디지털화를 위해 상용 전류원과 마이크로컨트롤러를 사용했으며, 제작된 센서는 0.05–760 Torr 범위에서 작동하여 기존 MEMS 아날로그 압력 센서와 동일한 성능을 보였습니다.
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