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연속공정기반 저온 상압 원자층 증착 시스템을 이용한 유무기 멀티레이어 배리어 박막에 관한 연구
Author
이재욱, 김현범, 최경현
Journal Title
한국기계가공학회지
Publication Year
2018
Topics
Summary
This study fabricated organic-inorganic multilayer barrier thin films using PMMA and Al2O3, utilizing a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system to grow the films under atmospheric conditions. The fabricated barrier films exhibited excellent morphological, optical, and chemical properties, with the Al2O3 film effectively compensating for the non-uniformity of the PMMA film, resulting in a high optical transmission of approximately 85%.
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