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Near Infrared Reflecting Properties of TiO2/Ag/TiO2 Multilayers Prepared by DC/RF Magnetron Sputtering
저자
김성한, 김서한, 송풍근
학술지명
대한금속·재료학회지
출판/발행연도
2017
주제
요약
본 연구는 DC/RF 마그네트론 스퍼터링으로 제작된 TiO2/Ag/TiO2 다층 박막의 근적외선 반사 특성을 조사했습니다. 은 층의 두께 증가는 표면 플라즈몬 공명 효과로 인해 근적외선 영역에서 반사율을 크게 증가시켰으며, 12nm 두께의 은 층을 갖는 다층 박막이 우수한 투과율과 반사율을 동시에 나타냈습니다.
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