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Effect of thickness on moisture barrier properties of aluminum oxide using ozone-based atomic layer deposition
저자
Juhyun Lee, Seokyoon Shin, Sejin Kwon, Woochool Jang, Hyeongsu Choi, Hyunwoo Park, Namgue Lee, 전형탁
학술지명
Journal of Ceramic Processing Research
출판/발행연도
2021
주제
요약
본 연구는 오존 기반 원자층 증착법으로 제조된 알루미늄 산화물(Al2O3) 박막의 두께가 수분 차단 특성에 미치는 영향을 조사했습니다. 전기적 칼슘 테스트 결과, Al2O3는 10~25nm 두께에서 수증기 투과율(WVTR)이 지수적으로 감소했지만, 25~100nm 두께에서는 감소폭이 줄어드는 두 가지 뚜렷한 투과 영역을 보였습니다. 결함 밀도 및 굴절률 측정 결과는 수분 차단 성능과 유사한 두께 의존성을 나타냈으며, WVTR이 급격히 감소하는 임계 두께 존재를 확인했습니다.
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