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논문 목록
Fabrication of shape memory alloy based micro robot by using focused ion beam milling process and actuation using ultraviolet laser
저자
Kim, Min-Soo; Lee, Hyun-Taek; Lee, Kang-In; Ahn, Sung-Hoon
학술지명
NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XV
출판/발행연도
2018
주제
요약
본 연구는 형상 기억 합금 기반 마이크로 로봇 제작을 시연하며, 직경 25μm의 형상 기억 합금 와이어를 집속 이온 빔 밀링으로 절단 및 패턴화하여 로봇의 형태를 제작했습니다. 제작된 로봇은 양방향 형상 기억 효과에 의해 수축 및 이완하며, 자외선 레이저를 이용하여 광열 효과를 통해 구동되어 2.5μm/s의 속도로 이동합니다.
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