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Annealing effects on photoresist films' mechanical and chemical resistance
저자
Avellaneda, Manuel; Boasso, Andrés; Sirena, Martín; Roa, Simón
학술지명
Surfaces and Interfaces
출판/발행연도
2023
주제
요약
본 연구는 열처리 온도가 MICROPOSIT 포토레지스트 필름의 기계적 강도(열 유도 재료 경화)에 미치는 영향을 체계적으로 조사했습니다. 열처리 온도가 증가함에 따라 필름의 소성 변형 민감도가 감소하고, 에너지 소산 계수 및 경도가 증가하여 기계적 강도 향상을 확인했습니다. 또한, 열처리 온도가 높을수록 습식 화학 에칭에 대한 저항성이 향상되는 것을 관찰했습니다.
학술지 영향력
[Surfaces and Interfaces]
- CiteScore
- 8.5
- ES
- 0.01435
- JCI
- 1.12
- JCR
- 6.3
- SJR
- 1.036
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